MetaOptics-Software to generate GDSII layouts for metasurfaces:

MetaOptics uses FDTD phase vs varying dimension data for a given geometry (cross, cylinder etc.) and creates a GDSII layout for any DOE phase mask. It also has an inbuilt library to generate Axicons, FZLs and Spiral Phase plates. MetaOptics is released under CC by NC 3.0 license.

Link to source code on GitHub

Download software reference manual

GDoeSII-Image to GDSII conversion Software:

Raghu Dharmavarapu, a PhD student in Applied Optics group has developed a software (GDoeSII) that can convert Image files to GDSII lithography formats. The Software can also perform Scalar Diffraction simulations. This is a very simple, easy-to-use and fast tool. GDoeSII is released under CC by NC 3.0 license.

GDoeSII is now published as an open-source software on SoftwareX (Elsevier) and please cite this if you used for your research.

Raghu Dharmavarapu, Shanti Bhattacharya, Saulius Juodkazis, “GDOESII: Software for design of diffractive optical elements and phase mask conversion to GDSII lithography files,” SoftwareX 9, 126-131 (2019) . Article link