Nanofabrication

Nanofabrication
Software





Oxford Plasmalab RIE
Oxford Plasmalab RIEOxford Plasmalab ICP RIE System
Confocal microscope
Confocal microscopeOlympus confocal microscope
SUSS Microtec UV lithography
SUSS Microtec UV lithographySUSS MA6/BA6 Photolithography
Raith Electron beam lithography
Raith Electron beam lithographyRaith 150TWO Electron beam lithography.

For more information on advanced fabrication facilities please refer to the Center for NEMS and Nanophotnonics (CNNP) Website.