Centre for Nanoelectromechanical Systems (NEMS) and Nanophotonics (CNNP)

Dielectric Deposition Tool Name - ICP Plasma Enhanced Chemical Vapour Deposition (PECVD).jpg

Dielectric Deposition Tool Name - LPCVD.jpg

Dielectric Deposition Tool Name - Plasma Enhanced Atomic Layer Deposition (PEALD).jpg

Dry Etch Tool Name - Deep Reactive Ion etching (DRIE).jpg

Dry Etch Tool Name - ICPRIE (Cl2&BCl3).jpg

Dry Etch Tool Name - ICPRIE - (Cl2&HBr).jpg

E-Beam Deposition Tool Name - E-Beam Metalization 1.jpg

E-Beam Deposition Tool Name - E-Beam Metalization 2.jpg

Furnace Processing Tool Name - Oxidation Furnace.jpg

Furnace Processing Tool Name - Rapid Thermal Process (RTP).jpg

Furnace Processing Tool Name - SVCS (4 Stack Furnace).jpg

Furnace Processing Tool Name - Tempress Furnace.jpg

In house Development Tool Name - Critical Point Dryer (CPD).jpg

Lithography Tool Name - Deep UV Lithography - Mask Aligner(Karl Suss MA6 BA6).jpg

Lithography Tool Name - E-Beam Lithography - RAITH.jpg

Lithography Tool Name - Photo Lithography - Mask Aligner(Karl Suss MA6 BA6).jpg

Lithography Tool Name - Spin Coater - HOLMARC.jpg

Lithography Tool Name - Spin Coater - SUSS Microtech.jpg

Sputter Deposition Tool Name - DC Magnetron Sputtering-HHV.jpg

Sputter Deposition Tool Name - RF Sputtering (HHV).jpg

Sputter Deposition Tool Name - RF Sputtering (Minilab 060).jpg

Sputter Deposition Tool Name - Table Top RF Sputtering - Nano PVD 2.jpg

Sputter Deposition Tool Name - Table Top RF Sputtering- Nano PVD 1.jpg

Thermal Evaporator Tool Name - Thermal Metal Evaporation (2).jpg

Thermal Evaporator Tool Name - Thermal Metal Evaporation.jpg

Wet Processing Tool Name - Constant Temperature Bath (KOH).jpg

Wet Processing Tool Name - HF Vapor Etcher.jpg

Wet Processing Tool Name - Wet bench Acid Clean.jpg

Wet Processing Tool Name - Wet bench solvent clean.jpg