| MS TSA Meeting

Name of the Speaker: Mr. SREERAJ P NAMBIAR (EE21S022)
Guide: Prof. Shanti Bhattacharya
Venue: ESB-244 (Seminar Hall)
Online meeting link: https://meet.google.com/jcv-vbyf-aiz
Date/Time: 25th June 2024 (Tuesday), 3:00 PM
Title: Design and fabrication of an electrothermally actuated MEMS mirror for microendoscopy.

Abstract :

Owing to the progress in microfabrication techniques, MEMS devices have become more affordable and sophisticated. Among MEMS devices, micromirrors or MEMS mirrors have attracted considerable attention since the development of the scanning micromirror. These scanning micromirrors are used in endoscopes, LiDAR, and other applications. This study presents the design, fabrication, and testing of a silicon-on-insulator wafer (SOI) based electrothermally actuated scanning MEMS mirror for a micro-endoscope.

The design and simulation studies for the required specification were conducted using Coventorware. Based on the simulation results, various parameters of the micromirror were finalized. A four-mask fabrication process flow was developed for the production of the micromirror. Following the optimization of each step, the micromirror was fabricated and characterized, demonstrating a scanning angle of ±3 degrees in line with the design.