Course Details

Course details of EE6346W
Course NoEE6346W
Course TitleAdvanced CMOS Devices and Technology
Course ContentReview of CMOS scaling. Problems with traditional geometric scaling. Power crisis. Basic quantum mechanicsMobility enhancement techniques. Types and realization of stress elements. Integration challengesProcess integration of high k gate dielectrics and metal gatesMulti-gate transistors. Ways of realization. Integration challengesHigh mobility channel materialsLayout dependent effects.Test structures used for characterization.Variations and how it can affect scaling.
Course Offered this semesterNo
Faculty Name