Course Details

Course details of EE6346
Course NoEE6346
Course TitleAdvanced CMOS Devices and Technology
Credit9
Course ContentReview of CMOS scaling. Problems with traditional geometric scaling. Power crisis. Basic quantum mechanics Mobility enhancement techniques. Types and realization of stress elements. Integration challenges Process integration of high k gate dielectrics and metal gates Multi-gate transistors. Ways of realization. Integration challenges High mobility channel materials Layout dependent effects. Test structures used for characterization. Variations and how it can affect scaling.
Course Offered this semesterNo
Faculty Name