Course Details

Course details of EE5312
Course NoEE5312
Course TitleVLSI Technology
Course ContentIntroduction: Overview of VLSICrystal structure and Single Crystal growth of siliconEpitaxyOxidationDiffusionIon-implantationLithographyDry and Wet EtchingChemical Vapour Deposition of thin filmsMetallizationMOSFET process flow with a view towards performance improvementBJT Process flow with a view towards performance improvementCurrent trends and challenges
Course Offered this semesterNo
Faculty Name