The Microelectronics and MEMS laboratory of the Electrical Engineering Department has a strong base in silicon and GaAs based devices. Since 1996 research and development in MEMS is being carried out in close collaboration with Departments of Biotechnology and Mechanical Engineering. MEMS has been one of the successful Interdisciplinary Research Programmes (IDRP) run by IIT Madras. The Photonics group has been active since 2001 and closely interacts with the Microelectronics and MEMS laboratory in developing a variety of photonic devices.

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