Optical waveguide or photonic wire is the basic building block of a photonic integrated circuit. Although a number of Silicon Photonic Devices have already been demonstrated in recent years, lack of low-loss waveguide with higher coupling efficiency to integrate them together prevented the realization of the Photonic Integrated Circuit. Therefore, this research proposal is primarily focused to establish the fabrication technology of low-loss waveguide with higher coupling efficiency in Silicon-On-Insulator (SOI) platform. The existing microelectronics facilities could be exploited to fabricate the single-mode ridge waveguide on the surface of SOI. The end-faces of fabricated waveguides will be optically polished. Waveguide losses will be estimated by the measurement of low-finesse Fabry-Perot transmission technique. The light coupling efficiency will be improved by the suitable design of tapered waveguide, V-grooves or by the integrated grating structure at the inputs and outputs.