image not found

Integrated Optoelectronics Group
Department of Electrical Engineering
Indian Institute of Technology Madras, Chennai 600036, India
 
 
Home
People
Research
Publications
Facilities
 
   
 



Facilities

Available Facillities

Designing Tools
  • R-Soft Designing Tool
  • MEDICI
  • TSUPREM4

    • Process Facillities
  • Mask writer
  • Thermal Evaporation
  • E-Beam Deposition
  • PECVD
  • Mask Aligners
  • Reactive Ion Etching
  • Annealed Proton Exchange Setup
  • Dicing Machines
  • Polishing Machine

    • Characterizations
  • Microscope
  • Surface Profiler
  • Ellipsometer
  • Electronic Probe Station
  • Photonics Device Charaterization

    • Upcoming Facillities

  • Mask Aligner with with DUV nano imprint lithography, Funded by DST FIST Program
  • Advanced Wafer Dicing Saw (Funded by DIT Center for NEMS & Nanophotonics)
  • E-beam Lithography (Funded by DIT Center for NEMS & Nanophotonics)
  • High Resolution OSA(Funded by DIT Center for NEMS & Nanophotonics)






    		•  image not found
    image not found
    image not found
    image not found
    image not found
    image not found
    		 
     
    		 
     

    IITM Home | Mems & Microelectronics | Tenet Group | Optics |

    Free counter and web stats  
    Copyright © 2009 - IO Lab, Dept. of EE, IIT Madras | Phone: +91 44 2257 5495, E-mail: iolab.iitm@gmail.com | Last Updated 22 March 2012 | Comments to: Webmaster