EE5380
Course name:
Characterization of Semiconductor Materials & Devices
Structural characterization : Electron Microscopy, ESCA, ESIC, Electron Microprobe, ESR. Ion beam Techniques: SIMS, RBS X-ray Techniques. Optical characterization : UV, Visible, IR Absorption, Micro wave - absorption, Ellipsometry, Photoluminescenee, Photothermal Deflection Spectroscopy, Raman Spectroscopy. Electrical Characterization Material: Resistivity, Mobility, Doping concentration, Lifetimes, Photo conductivity, Diffusion Length. Devices: Contact Resistance, Barrier height, Interface charge, DLTS, C-V, C-T, G-V, TSC, TSCA, charge pumping.
