List of Main Equipment

• RIE system
• Thermal Oxidation
• LPCVD unit
• PECVD unit
• Substrate bonder
• Mask aligner
• Mask writer
• Class1000 clean room with bonder and aligner
• Photoresist coating unit
• Probe station
• Surface profiler
• Parameteric Analyser
• LCR meters
• E-beam metallisation
• Computing facilities
• Ellipsometer

Images of Equipment

Computing	CleanRoom with Bonder and Aligner	LCR Meters
LPCVD System	EBeam Metalization	Probe Station
Mask Aligner	Mask Writer	Parametric Analyzer
PECVD System	Photoresist Spinner	Surface Profiler
Wafer Loading	RIE System	Substrate Bonder