Optical MEMS Sensors



There is much research work going on in the area of MEMS. Adding optical functionality to MEMS involves much more than making surfaces reflective. This is an exciting area, since one has to work with engineers from the MEMS process, MEMS design, packaging and testing areas. Design of such systems, therefore, means a lot of inter-disciplinary work and makes this a challenging field. 

MEMS Lamellar grating used in Fourier transform spectroscopy.